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  2. Central Fabrication Laboratory (Charaterization)

KLA Alpha-Step D-600
Surface Profiler

The KLA Alpha‑Step D‑600 is a precision surface profilometer designed for advanced thin‑film and material characterization. Using stylus‑based measurement, it delivers accurate step height, roughness, and stress analysis across a wide range of substrates. Compact yet versatile, the D‑600 supports research and industrial applications in semiconductors, MEMS, and nanotechnology, ensuring reliable data for process development and quality control.

Attachments / Specifications:

- Vertical resolution: 0.38 Å
- Lateral resolution: 100 nm
- Max scan length: 55 mm max.
- Scan speed: 0.1 ~ 0.4 mm/s
- Stylus force: 0.03~15 mg
- Stylus radius: 2 μm
- Display mag.: 1~4 x

Person-in-charge:

Mr. Yip P. S. - psanyip@hku.hk