The University of Hong KongThe University of Hong Kong
University Central Facilities
Interdisciplinary and Core Research Facilities

  1. Facilities
  2. Central Fabrication Laboratory (SEM/ FIB)

Thermo Scientific Helios 5 CX
DualBeam Focus Ion Beam

Helios 5 CX combines the innovative Elstar Electron Column for ultra-high-resolution imaging and the highest materials contrast (the resolution can reach 0.6 nm at 30 kV STEM and 15 kV and 0.9 nm at 1 kV) with the superior Tomahawk Focused Ion Beam (FIB) Column for the fastest, easiest and most precise high-quality sample preparation. It provides the most advanced electron and ion optics, the Helios 5 CX DualBeam incorporates a suite of state of-the-art technologies that enables simple and consistent high resolution S/TEM and Atom Probe Tomography (APT) sample preparation, as well as the highest-quality subsurface and 3D characterization, even on the most challenging samples.

Attachments / Specifications:

- Oxford Instruments Ultim Max 170 EDS Detector with AZtec software, AZtecLive
- Oxford Instruments Symmetry S3 EBSD Detector with AZtecHKL, AZtecSynergy, AZtecCrystal
- Raith ELPHY MultiBeam E-beam Lithography System
- Tungsten, Carbon, Xenon difluoride, Chlorine, Platinum Gas Injection System
- Thermo Scientifi EasyLift NanoManipulator
- Software included AutoTEM 5, Auto Slice & View 5, iFast

Person-in-charge:

Mr. Chan Y. F. Frankie - emuchan@hku.hk
Dr. Zheng F. Y. Karen - karenzfy@hku.hk
Mr. Lee W. S. - wslee@hku.hk

Project/ Fund Source:

BRC(2020/21)/ UDF(2020/21), Nanofabrication Facilities

Zeiss Sigma 300 VP
Variable Pressure FEG Scanning Electron Microscope

The Sigma 300 VP offers ultra high resolution for both SE to image surface information and BSE to present compositional information in the high vacuum mode. Addtionally, a variable pressure (VP) mode is performed using nitrogen as imaging gas at pressures between 10 and 133 Pa. In this mode SE contrast is realised by the dedicated VPSE G4 detector and BSE contrast again by 5 segment high definition solid state BSE detector.


Person-in-charge:

Mr. Chan Y. F. Frankie - emuchan@hku.hk
Dr. Zheng F. Y. Karen - karenzfy@hku.hk
Mr. Lee W. S. - wslee@hku.hk

Project/ Fund Source:

undefined