The University of Hong Kong
University Central Facilities
Science and Engineering Core Service (Metaphase)

LEO 1530
FEG Scanning Electron Microscope

LEO 1530 scanning electron microscope include GEMINI hot cathode field emission column emitter; Super resolution and high image quality at low operating voltage ~3nm at 1 KV; Wide operating voltage range 1kV to 30 KV; High probe current and stability for fast X-ray analysis; In-lens annular detector for bright, clear surface-specific image; EDS system for elemental analysis and mapping; EBSP system also includes for the microtexture determination.

Attachments:

- Oxford Instruments X-Max 50 EDS Detector with AZtec software

- Oxford Instruments NordlysNano EBSD Detector with AZtecHKL, AZtecSynergy software

FEI Quanta 200 3D
DualBeam Focus Ion Beam

The Quanta 200 3D DualBeam (FIB / SEM) is ideally suited to the industrial process control lab that must image or analyze multiple cross sections in challenging samples. For the materials science lab it offers the capability of in-situ dynamic experiments, 3D imaging and analysis and TEM sample preparation for more in-depth analysis. The Quanta 3D, with its tungsten electron column, focused ion beam column and gas injector system, is a full DualBeam offering all of the capabilities of site-specific cross sectioning, complex ion beam patterning, material deposition and etching, imaging and analysis.

Attachments:

- Platinum and Tungsten gas injection system

- Oxford instrumnets Omni-probe 200 nanomanipulator

Thermo Scientific Talos F200X
FEG Scanning Transmission Electron Microscope

Thermo Scientific Talos F200X STEM is a 200kV scanning transmission electron microscope that combines outstanding high-resolution STEM and TEM imaging. High-resolution field emission gun (FEG) provides 0.12 nm TEM resolution and 0.16 nm STEM resolution images. Talos F200X is a strong analytical instrument that delivers fast, precise, quantitative characterization of nanomaterials in multiple dimensions. It equips with 4 in-column SDD EDS detectors, post-column energy-filtered and a high-speed CMOS camera.

Attachments:

- Thermo Scientific Ceta 16M pixel (4k x4k) CMOS camera with high speed read-out 300 fps @512x512

- Thermo Scientific Super-X EDS system with four individual independent silicon drift detectors (SDDs)

- Gatan GIF Continuum ER System with EFTEM and EELS techniques (Energy resolution <0.3eV)

- STEM HAADF, BF, DF integrated Differential Phase Contrast (iDPC)

- TEM ,STEM, EDX Tomography

- Velox imaging and analysis software, Inspect 3D and Avizo 3D recostruction and visualization software

- DENS Solutions Wildfire D6 Double Tilt Heating Stage (up to 1200 °C)

Thermo Scientific Themis
FEG Environmental Transmission Electron Microscope

Themis ETEM is an atomic resolution TEM for materials analysis with an environmental mode for in-situ TEM studies. It equips Cs image corrector that provids 0.09 nm TEM point resolution. Themis ETEM builds on the proven Titan Environmental Transmission Electron Microscope (ETEM) concept by combining both standard  TEM/STEM (TEM and scanning transmission electron microscopy) and dedicated environmental TEM capabilities for time-resolved, in situ studies of the dynamic behavior of nanomaterials. The Themis ETEM is designed as a fully integrated platform for in situ experiments, such as exposing nanostructures to gaseous reaction/operating environments.

Attachments:

- Cs image corrector

- Gun monochromator

- Thermo Scientific Ceta 16M pixel (4k x 4k) CMOS camera with high speed read-out 300 fps @512x512

- STEM HAADF, BF, DF integrated Differential Phase Contrast (iDPC)

- Thermo Scientific NanoEx- i/v heating holder (RT - 1200°C)

- Oxford Instruments Xplore TEM EDS Detector with AZtecTEM software

Thermo Scientific Escalab QXi
X-ray Photoelectron Spectrometer (XPS) Microprobe

X-ray photoelectron spectroscopy (XPS) is a surface-sensitive quantitative spectroscopic technique based on the photoelectric effect that can identify the elements that exist within a material (elemental composition) or are covering its surface, as well as their chemical state, and the overall electronic structure and density of the electronic states in the material.

Escalab QXi Function included:
XPS - large area (LAXPS), small area (SAXPS), fast parallel imaging (XPI)
ISS (Ion Scattering Spectroscopy)
REELS (Reflection Electron Energy Loss Spectroscopy)
IPES (Inverse Photoemission Spectroscopy)
UPS (Ultraviolat Photoemission Spectroscopy)
AES (Auger Electron Spectroscopy) and SAM (Scanning Augar Mapping)
SEM (Scanning Electron Microscopy)

Application Areas: batteries, bio-surfaces, catalysts, ceramics, glass coatings, graphene, metals & oxides, nano-materials, OLEDs, polymers, semiconductors, solar cells, thin films etc.

Attachments:

- For more details information of the attachments. Please refer to X-Ray Photoelectron Spectroscopy Learning Center @ Thermo Scientific

- Monochromatic and micro-focused dual-anode Al Kα and Ag Lα source

- Small feature analysis from greater than 900 μm to less than 5 μm

- Flood gun for electron imaging and charge neutralization

- Low-energy Ion source and electron source for charge compensation

- Depth profiling

- Tilt module for angle resolved XPS (ARXPS) measurement

- Heating/Cooling Stage (-150°C to 320°C)

- Fracture Stage

- Vacuum transfer module for air-sensitive samples

Bal-tec SCD 005
Sputter Coater/ Carbon Coater

The BAL-TEC SCD 005 is a table-top sputter coater and produces very fine-grained, quality conductive films using precious metals: gold, gold/palladium, silver and platinum. Even large samples such as wafers for industrial processes can be coated. The BAL-TEC SCD 005 also offers single and multiple carbon thread evaporation for the production of conductive carbon films for X-ray microanalysis and carbon reinforcement films on collodion or formvar coated specimen support grids.

Fischione Model 1010
Ion Beam Milling

The Model 1010 Ion Mill is a tabletop, PC-controlled precision milling and polishing system for creating high-quality TEM specimens with large electron transparent areas. This system incorporates two independently adjustable, variable energy hollow anode discharge (HAD) ion sources, liquid nitrogen specimen cooling, 0° to 45° milling angles, automatic gas control, and an oil-free vacuum system for ultra-clean specimen processing.

Pelco EasiGlow 91000
Glow Discharge Cleaning System

The PELCO EasiGlow Glow Discharge Cleaning System is a compact, quick and easy to use standalone system. It is primarily designed for cleaning TEM grids and hydrophilization of TEM carbon support films, which have the tendency to be hydrophobic. A glow discharge treatment with air will make a carbon film surface negatively charged (hydrophilic) which allows aqueous solutions of particles to spread uniformly easily. The unit greatly facilitates projects requiring negative staining or cryo-TEM.